| 卫克晶,孙学金,杜利东.差压式测风微传感器敏感元件的设计[J].装备环境工程,2019,16(6):1-4. WEI Ke-jing,SUN Xue-jin,DU Li-dong.Design of Sensitive Element for Differential Pressure Wind Micro Sensor[J].Equipment Environmental Engineering,2019,16(6):1-4. |
| 差压式测风微传感器敏感元件的设计 |
| Design of Sensitive Element for Differential Pressure Wind Micro Sensor |
| 投稿时间：2019-01-30 修订日期：2019-06-25 |
| DOI：10.7643/ issn.1672-9242.2019.06.001 |
| 中文关键词: MEMS技术 测风微传感器 敏感元件 仿真与分析 |
| 英文关键词:MEMS technology wind micro sensor sensitive element simulation and analysis |
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| 中文摘要: |
| 目的 提高测风微传感器的测量准确性。方法 首先通过有限元仿真软件对差压式测风微传感器敏感元件材料进行仿真，确定结构参数；其次对风测量元件结构周边的风压分布进行模拟，建立最佳风压分布方程，并基于风压分布方程设计风速风向解算算法。结果 通过对风压分布的仿真与分析，提出了多导风孔的结构设计及带硅岛压力膜作为风压感压膜的方法。结论 该方法提高了测风微传感器的测量准确性。 |
| 英文摘要: |
| Objective To improve the measurement accuracy of wind micro sensor. Methods Firstly, the finite element sim-ulation software was used to simulate the material of the sensitive element for the differential pressure micro sensor to determine the structural parameters. Secondly, the wind pressure distribution around the structure of the wind measurement element was simulated to establish an optimal wind pressure distribution equation; and the wind speed and direction calculation algorithm was designed based on the wind pressure distribution equation. Results Through simulation and analysis of the wind pressure distribution, the structural design of multiple air holes and the method of taking the pressure film with silicon island as the pressure sensitive film were proposed. Conclusion The method improves measurement accuracy of the wind micro sensor. |
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