| 詹雪奎,万强,凌明祥.异形电极调控的体声波谐振器力–电多场耦合仿真与优化[J].装备环境工程,2022,19(6):127-132. ZHAN Xue-kui,WAN Qiang,LING Ming-xiang.Electromechanical Coupling Simulation and Optimization of Film Bulk Acoustic Resonators Regulated by Shaped Electrode[J].Equipment Environmental Engineering,2022,19(6):127-132. |
| 异形电极调控的体声波谐振器力–电多场耦合仿真与优化 |
| Electromechanical Coupling Simulation and Optimization of Film Bulk Acoustic Resonators Regulated by Shaped Electrode |
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| DOI：10.7643/issn.1672-9242.2022.06.000 |
| 中文关键词: 薄膜体声波谐振器 压电效应 多物理场耦合 有限元 频率响应 寄生振动中图分类号:TN384 文献标识码:A 文章编号:1672-9242(2022)06-0127-06 |
| 英文关键词:film bulk acoustic wave resonator piezoelectric effect multi-field coupling finite element method frequency response spurious vibration |
| 基金项目:中国工程物理研究院创新发展基金(2019YCX04011) |
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| 中文摘要: |
| 目的 抑制压电薄膜体声波谐振器(FBAR)寄生振动模态干扰，提出一种异形电极调控的谐振器新结构，并进行力–电多物理场耦合有限元建模分析与参数优化。方法 基于压电薄膜体声波谐振器的力–电耦合方程，运用有限元方法进行参数影响仿真分析，获得不同电极结构形状与敏感几何参数对应的谐振器阻抗特性及寄生振动模态干扰的影响规律，并对提出的异形电极调控谐振器几何参数进行优化。结果 新型电极结构使得薄膜体声波谐振器的导纳特性曲线更加平滑，相位波纹减少，无明显寄生谐振峰。参数优化所得框状电极宽度为6 μm、厚度为0.1 μm，谐振频率为1.727 GHz。结论 通过异形电极结构形状设计，可以实现对谐振器寄生振动模态的有效抑制，提升谐振器的性能。 |
| 英文摘要: |
| The paper aims to suppress the parasitic vibration mode interference of the piezoelectric film bulk acoustic resonator (FBAR), propose a new structure of FBAR regulated by shaped electrode, and carry out the finite element modeling analysis and parameter optimization of the mechanical-electrical multi-physical field coupling. Based on the coupled equation of the piezoelectric film bulk acoustic resonator, the simulation analysis was carried out by employing the finite element method to obtain the impedance characteristics and the influence of parasitic vibration modal interference subjected to different electrode shapes and sensitive geometric parameters. Consequently, the optimal geometric parameters of the newly developed resonator were obtained. The finite element simulation results show that the proposed electrode shape provides smoother admittance curve, less phase ripple without obvious spurious resonance peak, the width of the frame electrode is 6 μm, the thickness is 0.1 μm, and the resonance frequency is 1.727 GHz.The shaped electrode can effectively suppress the spurious resonance and improve the performance of the resonator. |
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