硅基底增透膜湿热环境自然暴露与加速试验研究

赵远荣; 王冲文; 李晗; 刘剑; 杨玉萍; 魏小琴; 刘艳芳

doi:10.7643/issn.1672-9242.2026.10.018

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装备环境工程 ›› 2026, Vol. 23 ›› Issue (10) : 158-167. DOI: 10.7643/issn.1672-9242.2026.10.018

环境试验与观测

硅基底增透膜湿热环境自然暴露与加速试验研究

赵远荣^1,2,3, 王冲文^1,2,3, 李晗⁴, 刘剑^1,2,3, 杨玉萍^1,2,3, 魏小琴⁴, 刘艳芳^1,2,3

作者信息 +

Study on Natural Exposure and Accelerated Aging Tests of Silicon Substrate Anti-reflection Coatings in Hot-Humid Environment

ZHAO Yuanrong^1,2,3, WANG Chongwen^1,2,3, LI Han⁴, LIU Jian^1,2,3, YANG Yuping^1,2,3, WEI Xiaoqin⁴, LIU Yanfang^1,2,3

Author information +

文章历史 +

摘要

目的揭示湿热环境下硅镀增透膜光学玻璃的失效规律,明确棚下自然暴露、黑框加速与玻框加速试验的差异,阐明黑框、玻框加速试验在光学玻璃环境适应性评价中的应用价值与作用机理。方法以西双版纳湿热环境为试验背景,开展棚下自然暴露试验、黑框加速试验和玻框加速试验,以1个月为1个试验周期,共开展5个周期试验。采用扫描电子显微镜（SEM）、能谱仪（EDS）、傅里叶红外光谱（FTIR）、拉曼光谱（Raman）对样品的表面形貌、元素组成、化学结构及光学透过率进行表征测试分析。结果随试验周期增加,样品逐渐出现点蚀、表面变色等损伤现象,损伤严重程度依次为玻框加速试验、黑框加速试验、棚下暴露试验,玻框试验组出现严重腐蚀点,光学透过率显著下降。结论黑框、玻框加速试验可通过强化湿热积聚、冷凝效应与光热耦合作用,快速复现硅镀增透膜光学玻璃的自然失效行为,能够高效评价湿热环境下增透膜的环境适应性,可为光学玻璃装备的环境试验优化与防护设计提供支撑作用。

Abstract

The work aims to reveal the failure law of silicon anti-reflection coated optical glass in hot and humid environment, clarify the differences among shed natural exposure test, black frame accelerated test and glass frame accelerated test, and illustrate the application value and mechanism of black frame and glass frame accelerated tests in the environmental worthiness evaluation of optical glass. Taking the hot and humid environment of Xishuangbanna as the test background, shed natural exposure tests, black frame accelerated tests and glass frame accelerated tests were carried out for 5 cycles with one month as a cycle. Scanning Electron Microscope (SEM), Energy Dispersive Spectrometer (EDS), Fourier Transform Infrared Spectroscopy (FTIR) and Raman Spectroscopy (Raman) were used to characterize the surface morphology, element composition, chemical structure and optical transmittance of the samples. With the increase of test cycles, the samples gradually showed pitting corrosion, surface discoloration and other failure phenomena. The damage severity was in the order of glass frame accelerated test> black frame accelerated test>shed exposure test. The glass frame test group had serious corrosion points and significantly decreased optical transmittance. Black frame and glass frame accelerated tests can quickly reproduce the natural failure behavior of silicon anti-reflection coated optical glass by strengthening damp heat accumulation, condensation effect and photothermal coupling, which can efficiently evaluate the environmental worthiness of anti-reflection coatings in hot and humid environments and provide support for the optimization of environmental tests and protection design of optical glass equipment.

导出引用

赵远荣, 王冲文, 李晗, 刘剑, 杨玉萍, 魏小琴, 刘艳芳. 硅基底增透膜湿热环境自然暴露与加速试验研究[J]. 装备环境工程. 2026, 23(10): 158-167 https://doi.org/10.7643/issn.1672-9242.2026.10.018

ZHAO Yuanrong, WANG Chongwen, LI Han, LIU Jian, YANG Yuping, WEI Xiaoqin, LIU Yanfang. Study on Natural Exposure and Accelerated Aging Tests of Silicon Substrate Anti-reflection Coatings in Hot-Humid Environment[J]. Equipment Environmental Engineering. 2026, 23(10): 158-167 https://doi.org/10.7643/issn.1672-9242.2026.10.018

中图分类号： O484.4

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