| 陈炜,李庆林,王鹏,强志青,崔琦峰,乔丽.卫星展开机构用热刀切割器大气失效机理分析[J].装备环境工程,2024,21(8):83-95. CHEN Wei,LI Qinglin,WANG Peng,QIANG Zhiqing,CUI Qifeng,QIAO Li.Atmospheric Failure Mechanism of Thermal Knife Used in Satellite Deployment Components[J].Equipment Environmental Engineering,2024,21(8):83-95. |
| 卫星展开机构用热刀切割器大气失效机理分析 |
| Atmospheric Failure Mechanism of Thermal Knife Used in Satellite Deployment Components |
| 投稿时间：2024-04-25 修订日期：2024-05-27 |
| DOI：10.7643/issn.1672-9242.2024.08.011 |
| 中文关键词: 图案化薄膜 热刀切割器 磁控溅射 失效机理 铂基薄膜 热稳定性中图分类号:V259 文献标志码:A 文章编号:1672-9242(2024)08-0083-13 |
| 英文关键词:patterned film thermal knife magnetron sputtering failure mechanism platinum-based film thermal stability |
| 基金项目:中国科学院战略性先导科技专项(XDB0470302)；国家自然科学基金(52061026，51561021)；甘肃省自然科学基金(23JRRA752)；甘肃省科技特派员(23CXGA0026)；甘肃省基础研究创新群体项目(20JR10RA062)；甘肃省重大科技专项(22ZD6GA002)；山东省先进材料与绿色制造实验室科研资助项目(SYS202203) |
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| Author | Institution |
| CHEN Wei | School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou 730050, China;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730030, China |
| LI Qinglin | School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou 730050, China |
| WANG Peng | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730030, China |
| QIANG Zhiqing | Institute of Aerospace System Engineering Shanghai, Shanghai 201100, China;Space Structure and Mechanism Technology Laboratory of China Aerospace Science and Technology Group Co., Ltd., Shanghai 201100, China |
| CUI Qifeng | Institute of Aerospace System Engineering Shanghai, Shanghai 201100, China;Space Structure and Mechanism Technology Laboratory of China Aerospace Science and Technology Group Co., Ltd., Shanghai 201100, China |
| QIAO Li | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730030, China |
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| 中文摘要: |
| 目的 分析图案化电阻Pt薄膜在大气环境下使用寿命下降的原因。方法 基于此，选取现有型号热刀切割器图案化电阻薄膜，制备不同厚度Pt/Ti膜，重点考察大气环境下薄膜表界面形貌、成分、晶体结构随温度的变化规律及其对电阻率特性以及力学性能影响。结果 大气高温下，Ti过渡层从底层扩散至表面与Pt形成合金，部分Ti扩散至表面被氧化，合金化与氧化导致薄膜电阻率先升高后降低。同时，充当Pt薄膜与基底之间“黏合剂”的Ti过渡层扩散耗尽，导致Pt薄膜与氮化硅基底结合力降低。结论 以上因素最终导致了图案化薄膜热刀大气高温环境下切割寿命下降。 |
| 英文摘要: |
| The work aims to analyze the reasons for the decrease in service life of patterned resistive Pt thin films in atmospheric environments. Based on this, existing models of patterned resistance films of thermal knives were selected to prepare Pt/Ti films with different thickness. The changes of surface morphology, composition and crystal structure of the films with temperature in the atmospheric environment and their effects on resistivity and mechanical properties were investigated. It was found that at high atmospheric temperature, the Ti transition layer diffused from the bottom to the surface to form alloys with Pt, and part of Ti diffused to the surface to be oxidized, resulting in the trend of first increase and then decrease of the film resistance. At the same time, the Ti transition layer acting as the "adhesive" between the Pt film and the substrate, was exhausted by diffusion, resulting in a decrease in the binding force between the Pt film and the silicon nitride substrate.The above factors ultimately lead to the reduction in the cutting life of the thermal knife with patterned films as the core when used at high temperature in the atmospheric environment. |
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