沉积压强对Zr-B-C涂层性能的影响

国风; 马莉莎; 刘艳梅; 尹照星; 薛锐; 徐远剑; 张冬青; 王铁钢

doi:10.7643/issn.1672-9242.2025.06.015

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装备环境工程 ›› 2025, Vol. 22 ›› Issue (6) : 127-136. DOI: 10.7643/issn.1672-9242.2025.06.015

重大工程装备

沉积压强对Zr-B-C涂层性能的影响

国风¹, 马莉莎^2,*, 刘艳梅¹, 尹照星¹, 薛锐³, 徐远剑⁴, 张冬青¹, 王铁钢^1,*

作者信息 +

Effect of Deposition Pressure on Properties of Zr-B-C Coatings

GUO Feng¹, MA Lisha^2,*, LIU Yanmei¹, YIN Zhaoxing¹, XUE Rui³, XU Yuanjian⁴, ZHANG Dongqing¹, WANG Tiegang^1,*

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文章历史 +

摘要

目的改善二硼化锆（ZrB₂）低断裂韧性和耐磨性差的问题。方法采用碳元素合金化策略,通过高功率脉冲磁控溅射（HiPIMS）与脉冲直流磁控溅射（pulsed DC）协同技术,通入C₂H₂气体制备Zr-B-C涂层,系统探究沉积压强（0.5~1.0 Pa）对涂层结构性能的影响规律。通过X射线衍射仪（XRD）、扫描电子显微镜（SEM）和纳米压痕仪等分析手段,系统表征涂层的物相组成、微观形貌、力学性能、摩擦学性能。结果通过X射线衍射（XRD）物相分析发现,所有Zr-B-C涂层沿(001)晶面择优生长,所有涂层均呈现六方结构ZrB₂与立方相ZrC的复合特征。在沉积压强为0.5 Pa时,硬度最高为23.3 GPa,弹性模量最大为378.6 GPa,摩损率最低为5.4×10^-7mm³/(mm·N)。随着沉积压强增大,硬度H和弹性模量E从工作压强为0.5 Pa时的23.3 GPa和378.6 GPa大幅度降低至0.8 Pa时的21.2 GPa和351.1 GPa。涂层临界载荷从41.3 N增加到51.2 N。结论沉积压强对涂层性能Zr-B-C有较大影响,在0.5 Pa沉积压强下,涂层的硬度、韧性、摩擦磨损性能最好。随着沉积压强的增大,涂层的硬度和摩擦系数逐渐降低,磨损率和临界载荷略有升高。

Abstract

The work aims to deal with the low fracture toughness and poor wear resistance of Zirconium diboride (ZrB₂). The carbide incorporation approach was used and controlled C₂H₂ gas was introduced to prepare Zr-B-C coatings by integrating high-power pulsed magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering (pulsed DC) to systematically explore the effect of deposition pressure (0.5-1.0 Pa) on the structural properties of the coatings. The phase composition, microscopic morphology, mechanical properties and tribological properties of the coatings were systematically characterized by analytical methods such as X-ray diffraction (XRD), scanning electron microscopy (SEM) and nanoindentation instrument. The structural analysis by XRD showed that all Zr-B-C coatings exhibited a significant (001) crystal plane preference orientation, and all coatings presented the composite characteristics of hexagonal ZrB₂ and cubic ZrC. At 0.5 Pa, the coating demonstrated optimal properties: maximum hardness of 23.3 GPa, highest elastic modulus of 378.6 GPa, and lowest wear rate of 5.4× 10^-7 mm³/(N·mm). With increasing deposition pressure from 0.5 Pa to 0.8 Pa, both hardness H and elastic modulus E decreased significantly from 23.3 GPa and 378.6 GPa to 21.2 GPa and 351.1 GPa, respectively. The critical load of the coating was improved from 41.3 N to 51.2 N. The deposition pressure significantly affects the properties of Zr-B-C coatings. At a deposition pressure of 0.5 Pa, the coating exhibits the best hardness, toughness, and tribological properties. However, as the deposition pressure increased, the coating hardness and frictional coefficient decreased, while the wear rate and critical load improves.

导出引用

国风, 马莉莎, 刘艳梅, 尹照星, 薛锐, 徐远剑, 张冬青, 王铁钢. 沉积压强对Zr-B-C涂层性能的影响[J]. 装备环境工程. 2025, 22(6): 127-136 https://doi.org/10.7643/issn.1672-9242.2025.06.015

GUO Feng, MA Lisha, LIU Yanmei, YIN Zhaoxing, XUE Rui, XU Yuanjian, ZHANG Dongqing, WANG Tiegang. Effect of Deposition Pressure on Properties of Zr-B-C Coatings[J]. Equipment Environmental Engineering. 2025, 22(6): 127-136 https://doi.org/10.7643/issn.1672-9242.2025.06.015

中图分类号： TG178

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