沉积温度对单一气源PECVD SiC涂层微观结构及力学性能的影响
李洋, 樊哲琼, 卢永恒, 郜建全, 王炫力, 宋希文
Effect of Deposition Temperature on the Microstructure and Mechanical Properties of SiC Coatings Prepared by Single Gas Source PECVD
LI Yang, FAN Zheqiong, LU Yongheng, GAO Jianquan, WANG Xuanli, SONG Xiwen
装备环境工程
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2025, (6): 101
-110
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DOI: 10.7643/issn.1672-9242.2025.06.012
