硅基底增透膜湿热环境自然暴露与加速试验研究
赵远荣, 王冲文, 李晗, 刘剑, 杨玉萍, 魏小琴, 刘艳芳
Study on Natural Exposure and Accelerated Aging Tests of Silicon Substrate Anti-reflection Coatings in Hot-Humid Environment
ZHAO Yuanrong, WANG Chongwen, LI Han, LIU Jian, YANG Yuping, WEI Xiaoqin, LIU Yanfang
装备环境工程
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2026, (10): 158
-167
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DOI: 10.7643/issn.1672-9242.2026.10.018
