Study on Natural Exposure and Accelerated Aging Tests of Silicon Substrate Anti-reflection Coatings in Hot-Humid Environment

ZHAO Yuanrong; WANG Chongwen; LI Han; LIU Jian; YANG Yuping; WEI Xiaoqin; LIU Yanfang

doi:10.7643/issn.1672-9242.2026.10.018

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Equipment Environmental Engineering ›› 2026, Vol. 23 ›› Issue (10) : 158-167. DOI: 10.7643/issn.1672-9242.2026.10.018

Study on Natural Exposure and Accelerated Aging Tests of Silicon Substrate Anti-reflection Coatings in Hot-Humid Environment

ZHAO Yuanrong^1,2,3, WANG Chongwen^1,2,3, LI Han⁴, LIU Jian^1,2,3, YANG Yuping^1,2,3, WEI Xiaoqin⁴, LIU Yanfang^1,2,3

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Abstract

The work aims to reveal the failure law of silicon anti-reflection coated optical glass in hot and humid environment, clarify the differences among shed natural exposure test, black frame accelerated test and glass frame accelerated test, and illustrate the application value and mechanism of black frame and glass frame accelerated tests in the environmental worthiness evaluation of optical glass. Taking the hot and humid environment of Xishuangbanna as the test background, shed natural exposure tests, black frame accelerated tests and glass frame accelerated tests were carried out for 5 cycles with one month as a cycle. Scanning Electron Microscope (SEM), Energy Dispersive Spectrometer (EDS), Fourier Transform Infrared Spectroscopy (FTIR) and Raman Spectroscopy (Raman) were used to characterize the surface morphology, element composition, chemical structure and optical transmittance of the samples. With the increase of test cycles, the samples gradually showed pitting corrosion, surface discoloration and other failure phenomena. The damage severity was in the order of glass frame accelerated test> black frame accelerated test>shed exposure test. The glass frame test group had serious corrosion points and significantly decreased optical transmittance. Black frame and glass frame accelerated tests can quickly reproduce the natural failure behavior of silicon anti-reflection coated optical glass by strengthening damp heat accumulation, condensation effect and photothermal coupling, which can efficiently evaluate the environmental worthiness of anti-reflection coatings in hot and humid environments and provide support for the optimization of environmental tests and protection design of optical glass equipment.

Key words

silicon anti-reflection coating / hot and humid environment / accelerated test / environmental worthiness

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ZHAO Yuanrong, WANG Chongwen, LI Han, LIU Jian, YANG Yuping, WEI Xiaoqin, LIU Yanfang. Study on Natural Exposure and Accelerated Aging Tests of Silicon Substrate Anti-reflection Coatings in Hot-Humid Environment[J]. Equipment Environmental Engineering. 2026, 23(10): 158-167 https://doi.org/10.7643/issn.1672-9242.2026.10.018

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